January 22, 2025 5 minuten reading time

Partner story | Delmic at Semicon04

Revolutionising Electron Microscopy into
Advanced Automated Metrology in Semicon 04

Delmic, led by CEO & Founder Sander den Hoedt, is a pioneering company based in Delft, The Netherlands, specialised in highperformance electron and light microscopy solutions. Their mission is to deliver advanced microscopy technologies that propel scientific research and industrial applications to new heights.

As a partner in the NXTGEN Hightech initiative, Delmic is dedicated to transforming electron microscopy from a manual tool into an advanced, highly automated metrology solution. This project aims to enhance the throughput and robustness of our systems while incorporating innovative data approaches. The collaboration with Technolution, TU Delft, Nearfield Instruments, and ARCNL is focused on taking their current tools to the next level in their technological roadmap.

Background of the project:
(nano) Metrology systems

This project is dedicated to developing advanced metrology systems to accelerate and enhance high-tech processes such as the fabrication of integrated circuits and precision diagnostics of biological tissues. It focuses on integrating systems for parallel data acquisition, which necessitates the processing and storage of large data streams. The project aims to automate and optimize workflows in laboratories and production environments to increase efficiency. Key areas include the development of faster and more accurate metrology systems, creating optimized workflows, and improving data analysis techniques to derive actionable insights from complex datasets.

Rol in Semicon04

In the Semicon 04 project, Delmic is at the forefront of developing cutting-edge metrology systems. A major challenge we address is the throughput bottleneck in electron microscopy, which is constrained by both system performance and the necessity of trained operators. Their efforts are concentrated on building systems and prototypes that enhance image acquisition speed and system automation. Resolving these throughput issues raises new questions regarding data acquisition and storage, and our goal is to streamline the entire metrology process from sample preparation to meaningful data analysis.

Delmic expects the NXTGEN Hightech project to signifi cantly boost their technological capabilities and market presence. This initiative not only allows them to pursue an advanced roadmap but also to do so collaboratively with leading industry partners and academic institutions. They foresee this cooperation strengthening their growth foundation, enabling them to develop new methodologies and systems that set industry standards. The project’s success will demonstrate the practical applications of their technologies in various fields, including semiconductor material performance, drugprotein interactions, and neuroscience.

Delmic contributes to the NXTGEN Hightech project with their innovative approach to transforming microscopy into metrology. By integrating advanced automation and data analysis, we aim to provide systems that deliver high-resolution imaging and actionable

Completed activities
  • Development of initial lab-scale prototypes demonstrating enhanced data acquisition and processing.

  • Improvement of system robustness for long-term automation.

  • Optimization of image calibration routines for automated acquisitions.

Future plans
  • Further optimisation of sensor technologies to enhance image quality.

  • Development of scalable data storage platforms and AI methodologies.

  • Implementation of new techniques for automated data acquisition and processing.

  • Ongoing experimental development and validation through specific use cases in various scientific domains.

Delmic's unique expertise

Delmic’s uniqueness lies in their integrated expertise in electron and light microscopy, advanced data analysis, and automation. Their collaborative spirit, honed through close partnerships with early customers, is a core strength they bring to this project. Their vision to transition from qualitative imaging to quantitative metrology will profoundly impact various industries, from next-generation semiconductor devices to drug development.

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