December 1, 2024 5 minutes reading time

Partner story | Technolution at Semicon04

Accelerating innovation in
nano-metrology with advanced data acquisition and secure machine control in Semicon04

Technolution Advance, a leader in high tech applications for the semiconductor industry and scientific institutions, is recognized for its deep expertise in designing advanced instruments. Building on extensive in-house knowledge and strategic partnerships, Technolution leverages connections across start-ups, scale-ups, and established enterprises in areas such as semiconductor equipment, optics, imaging, medical technology, and life sciences. This position enables Technolution to drive forward innovation in data acquisition

Project background: (nano) Metrology systems

This project is dedicated to developing advanced metrology systems to accelerate and enhance high-tech processes such as the fabrication of integrated circuits and precision diagnostics of biological tissues. It focuses on integrating systems for parallel data acquisition, which necessitates the processing and storage of large data streams. The project aims to automate and optimize workfl ows in laboratories and production environments to increase effi ciency. Key areas include the development of faster and more accurate metrology systems, creating optimized workfl ows, and improving data analysis techniques to derive actionable insights from complex datasets. In doing so, NXTGEN Hightech brings together 5 expert partners over the next seven years.

Role in Semicon 04: (Nano) Metrology Systems

In the Semicon 04 project, Technolution collaborates with Nearfield Instruments, Delmic, ARCNL, and Delft University of Technology to advance analytical metrology devices. The project aims to advance solutions for atomic force microscopy, scanning probe microscopy, and multi-beam electron microscopy. Technolution has taken a leading role, focusing on high-speed data acquisition and secure control, ensuring real-time data analytics and reliable information extraction essential to the development of state-of-the-art metrology technology. With the growing complexity and size of data streams in metrology, there’s an increased need for efficient data management and storage solutions. This challenge is critical in semiconductor and life sciences applications, where precise, rapid measurements are essential. Technolution’s focus on workflow automation helps transform traditionally manual, time-consuming processes into efficient, scalable solutions, enhancing the overall productivity and accuracy of metrology systems.

Completed Activities:
  • Definition and implementation of a streaming-based scalable data management and processing platform for imaging data

  • Demonstration of Signal Integrity & Power Integrity (SI/PI) to identify and show the effect of high-speed electronic signals in data acquisition electronics for high data rate metrology equipment

  • Image stichting quality analysis and system calibration to improve real-time image stitching for creating large area images

Planned Activities:
  • Contribute with multidisciplinary expertise in electronics, programmable logic, and software development & engineering to advance solutions for e.g. atomic force microscopy, scanning probe microscopy, and multi-beam electron microscopy

  • Development of modular control electronics

  • Development of scalable data management and AI data processing technologies

Technolution’s unique expertise

Technolution’s unique multidisciplinary approach spans software, electronics, and programmable logic. Through a strong foundation in systems engineering and system integration, they excel in addressing complex high tech equipment challenges. From the architecture defi nition of metrology equipment to workfl ow automation and real-time control, Technolution ensures a seamless and optimized data processing chain—from acquisition to post-processing. Their Technology Office continuously explores innovative tools and methods, reinforcing their commitment to providing solutions tailored to industry needs.

Technolution’s expertise not only accelerates the NXTGEN Hightech project but also strengthens its position as a trusted partner in developing technologies that push the boundaries of semiconductor and life sciences metrology. Through collaboration and forwardthinking innovation, Technolution contributes significantly to enhancing the technological capabilities and market impact of the entire consortium.

Innovation arises when talented people from different disciplines and of different expertise meet and inspire each other. We are multidisciplinary: our engineers master software, electronics and programmable logic. And we are enhancing our innovative power by working together with leading partners in high-tech domains.

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