Six new projects starting at NXTGEN Hightech

Overview of the new projects

Next-generation High-tech Systems Engineering: Modular design of complex dynamical systems

Main applicant: prof. N. van de Wouw –  Eindhoven University of Technology

Co-applicant: Prof.  B. Besselink –Groningen University

Maintaining the internationally leading position of the high-tech systems sector is vital for Dutch society, but urgently requires addressing two main challenges: the exploding complexity of system designs and the shortage of qualified system engineers. This proposal develops a next-generation systems engineering methodology that addresses these challenges by enabling the fully modular design of complex high-tech systems and achieving unprecedented levels of design automation. Tested on industrial case studies of leading companies in the semiconductor domain, this modular and scalable approach allows the Dutch high-tech industry to maintain its competitive edge.

Terahertz Tomography for Heterogeneous Systems on Chip (TERATOM)

Main applicant: Prof.  J. Gómez Rivas – Eindhoven University of Technology

Co-applicants: Prof. P.C.M. Planken (ARCNL), Prof. K. Matters-Kammerer (Eindhoven University of Technology), Dr J.L.M. van Mechelen (Eindhoven University of Technology), Dr A. Andreski (Saxion University of Applied Sciences), Dr Y. Tykhonenko-Polishchuk (Saxion University of Applied Sciences)

There is a strong need in the chip industry to measure the quality of as-grown semiconductor materials. Our research will make it possible to use terahertz electromagnetic radiation to locally measure important material properties, such as electrical conductivity, at different depths without damaging or even touching the materials. By realizing a prototype that can quickly scan over full wafers, Dutch semiconductor companies can optimise their production and lower costs. This will also reduce waste leading to a more sustainable production of semiconductor devices.

Optimized Low-Voltage Multi-Beam Electron Microscope and High Throughput CL detection

Main applicant: Dr J.P. Hoogenboom – Delft University of Technology

Co-applicant: Prof. A Polman (AMOLF)

Investigating materials at the highest possible resolution with electron microscopy is crucial for understanding diseases and for quality control in manufacturing computer chips. At present, electron microscopes image samples with only one beam, which makes them too slow to image samples larger than about 1 mm. The researchers will implement several innovations to make an electron microscope that can illuminate samples with many beams in parallel and that is also very sensitive to signals generated specifically by defects in the materials.

Enhanced bioluminescence for automated microbial contamination detection

Main-applicant: Dr O.S. Ojambati – Twente University

Co-applicant: Prof. A.Y. Mersha (Saxion University of Applied Sciences)

This project will develop a fast, cost-effective, highly sensitive microbial contamination detection system. By enhancing ATP bioluminescence with advanced nanotechnology and automation, we aim to improve public health, food safety, and pharmaceutical quality control, making cutting-edge microbial testing accessible to everyone. To achieve this goal we will use nanophotonic structures to enhance the bioluminescence intensity and exploit robotics and artificial intelligence to automate the procedure.

AI-driven Holistic Design and Control Tools For Planar Motors

Main-applicant: dr. ir. R. Tóth –  Eindhoven University of Technology

Co-applicants: prof. M. Langelaar (Delft University of Technology), prof. E.A. Lomonova (Eindhoven University of Technology)

Increasing expectations and market demands towards the semiconductor industry, pushes the design of high-precision mechatronic systems towards unprecedentedly high-performance specifications and complexities that the conventional iterative design concepts for mechanical (ME), electromagnetic (EM) and motion control (CT) components are unable to meet with. In this ground-breaking research, leading research groups of TU/e, TUDelft and key companies of the semiconductor equipment sector join forces to develop an AI-driven optimization process for joint optimal design of the ME topology and EM layout of high-precision planar actuators together with the involved control algorithms in a holistic automated approach.

CHiPS: Compact High-Performance Sensors

Main-applicant: dr. N. Bhattacharya (TUD)

Co-applicants: Dr J. van Heijningen (NIKHEF), Dr S.H. Hossain Nia Kani (Delft University of Technology), prof. J.L. Herder (Delft University of Technology)

The semiconductor industry needs faster and more accurate machines. The CHiPS project will create advanced sensors to solve vibration issues in semiconductor manufacturing. Our goal is to design highly sensitive sensors that can measure tiny movements with extreme precision. These sensors will be small, the size of a coffee cup, and much more sensitive than current technology. A team from Nikhef and TU Delft, with expertise in gravitational wave science and semiconductor technology, is collaborating in this project. Key industry partners, including ASML, DEMCON, Settels Savenije, IBS Precision Engineering, and IDE, are involved in developing and implementing this new technology.